PublicationIEEE International SOI Conference 2003Conference paperSGOI thinning and uniformity improvement using a fluoride GCIB processIEEE International SOI Conference 2003View publicationAbstractNo abstract available.Home↳ PublicationsDate29 Sep 2003PublicationIEEE International SOI Conference 2003AuthorsJ.O. ChuL.P. AllenW. SkinnerJ. HautalaT.G. TetreaultR. MacCrimmonC. SanteufemioE. DegenkolbD.B. FennerIBM-affiliated at time of publicationShare
