Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Paper
Scanning tunneling microscopy
Abstract
An overview of the status of Scanning Tunneling Microscopy (STM) is given. So far, the method has been applied mainly to surface structures. Examples are given for reconstructions on metal and semiconductor surfaces and adsorbate structures. It will become evident that the technique is likewise applicable to chemical investigations of surfaces on an atomic scale. © 1985.
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