Wavefront and caustic surfaces of refractive laser beam shaper
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
A new, accurate, and efficient algorithm is developed for the numerical evaluation of a class of singular integrals which arise in the BEM (boundary element method) analyses. The algorithm is based on an idea of scaling integration that utilizes a proportional relationship inherent in the numerical computation of the singular integrals over flat triangular elements. The present algorithm (scaling integration method) avoids the direct numerical evaluation of the integrand in the neighborhood of singularities. It is shown and demonstrated that the method is simpler, faster, and more accurate than standard Gaussian integration algorithms. An application of the method to the BEM analysis is also described and the results are favorably compared with the exact solution. © 1989.
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994