About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
Applied Physics Letters
Paper
Role of bubbles in laser-assisted wet etching
Abstract
Evidence is presented to explain laser-based aqueous salt etching in terms of vapor bubble growth conditions at the irradiated surface of a substrate. The effect of pulse and frequency modulation of a cw laser is investigated to determine growth behavior for adhering bubbles in pure water. The role of salt in solution (such as KOH, NaOH, or CaCl2) is discussed in terms of its function as a diffusion barrier for growing vapor bubbles. Etching data are presented for the case of a Cu-vapor laser applied to a Mn-Zn-ferrite substrate, comparing results with and without KOH in the etching solution.