Conference paper
Application of atomic-force microscopy to phase-shift masks
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
Results are presented on the observation of 5 μm×5 μm defects in a similar size periodic structure using self-pumping in a 5 mm×6 mm×5 mm barium titanate crystal and optics of NA ≈ 0.1 Signal-to-noise ratios in excess of 10:1 have been obtained, indicating that smaller sizes can be detected using a larger crystal and optics with higher NA without the need to magnify the object mask. The self-pumping geometry is useful in simplifying the experimental setup. © 1990.
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
A.P. Ghosh, J.E. Hurst Jr.
Journal of Applied Physics
R. Srinivasan, A.P. Ghosh
Chemical Physics Letters
R.E. Walkup, Ph. Avouris, et al.
Physical Review B