Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Raman spectra have been observed from two adjacent thin polymer films and the interfacial region. This has been made possible by the application of integrated optical techniques to Raman spectroscopy. The observed Raman spectra have their strongest intensity contributions from regions near the optical field intensity maxima, which can occur in either film or at the interface. Both the optical intensity and the scattering volume are increased significantly and Raman spectra with good signal-to-noise ratios can be obtained. The method will be briefly illustrated and spectra for a thin film of poly(styrene) on a film of poly(vinyl alcohol) will be shown for various (modes) optical profiles. © 1981, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids