J.C. Tsang, M.V. Fischetti
Microelectronics Reliability
Raman spectroscopy has been used to observe the C local mode in epitaxial CySi1-y layers grown by molecular beam epitaxy. The scattering cross section per C atom is independent of alloy concentration for y<2%. Lattice relaxation about substitutional C sites induces an extra peak near 475 cm-1.
J.C. Tsang, M.V. Fischetti
Microelectronics Reliability
J.C. Tsang, J.A. Kash
Proceedings of SPIE 1989
J.A. Kash, J.C. Tsang
Journal of Crystal Growth
J.C. Tsang, J.A. Kash
DRC 1997