Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Frequency modulation spectroscopy (FMS) is an optical heterodyne technique which allows high-resolution, high-sensitivity measurements of absorptions or dispersions associated with narrow spectral features. With new methods, the sensitivity limitations of FMS (caused by residual amplitude modulation) can be overcome, and quantum-limited performance can be readily achieved. © 1986.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Digital Discovery
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Journal of Magnetism and Magnetic Materials