Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
David S. Kung
DAC 1998
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Pradip Bose
VTS 1998