Publication
Journal of Applied Physics
Paper

Pyrolysis and laser ablation of plasma-polymerized fluorocarbon films: Effects of gold particles

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Abstract

Plasma-polymerized fluorocarbon (PPFC) films were analyzed by thermogravimetric analysis (TGA), direct pyrolysis/mass spectrometry, and laser-ablation/electron-impact mass spectrometry. Fourier transform mass spectrometry was used to detect products. The films were made by plasma polymerizing tetrafluoroethylene in an argon plasma. Two types of films were studied: with and without fine gold particles incorporated in the PPFC films. TGA showed that gold-containing films decompose more rapidly and at lower temperature with increasing gold content. Pyrolysis products were determined as a function of temperature. The predominant positive product ions, using 20 eV electron-impact ionization, were C2F4+, CF 3+ and a distribution of higher-mass unsaturated fluorocarbon species, CnFm+, up to at least n=14 and m≥n+1. The predominant negative ions, formed by electron attachment, were also unsaturated fluorocarbon ions which extended up to 1145 u in mass. These species are different from those observed from polytetrafluoroethylene pyrolysis. No dependence of the positive-ion mass spectral distributions of pyrolysis products on gold content of the films was observed. However, the negative-ion pyrograms had a dramatically different temperature dependence for films with and without gold. The results imply that the gold-containing films have regions of lower molecular weight, and a possible formation mechanism is suggested. Laser ablation formed low-mass neutral fluorocarbon species. Ablation of the gold-containing film under direct laser ionization conditions (higher laser power), produced a spectrum resembling the pyrolysis spectrum, suggesting that the gold particles affect the mechanism of the ablation.

Date

01 Dec 1992

Publication

Journal of Applied Physics

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