Properties and Microelectronic Applications of Thin Films of Refractory Metal Nitrides

Abstract

Refractory metal nitride coatings find numerous applications in cutting tools, wear resistant parts, and the jewelry industry. Recent investigations have disclosed interesting applications of thin films of refractory metal nitrides in microelectronics. This review discusses the preparation of such films by reactive evaporation and reactive sputtering and describes various applications in silicon-integrated circuit technology. © 1985, American Vacuum Society. All rights reserved.