Projection printing of gold micropatterns by photochemical decomposition

Abstract

Gold micropatterns have been generated by the laser photolysis of dimethylgold (III) acetylacetonate, Me2Au(acac), in the vapor phase. Linewidths as fine as 2 μm were readily obtained utilizing a simple optical projection system comprised of a 4× projection lens, a lithographic photomask, and the UV output from an excimer laser. The single-step, dry process for selectively producing metal patterns is highlighted.