Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
A process logic (PL) is defined that subsumes Pratt's process logic, Parikh's SOAPL, Nishimura's process logic, and Pnueli's Temporal Logic in expressiveness. The language of PL is an extension of the language of Propositional Dynamic Logic (PDL). A deductive system for PL is given which includes the Segerberg axioms for PDL and it is proved that it is complete. It is also shown that PL is decidable. © 1982.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
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PRX Quantum
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SPIE Photomask Technology + EUV Lithography 2007
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