Simeon Furrer, Dirk Dahlhaus
ISIT 2005
Simeon Furrer, Dirk Dahlhaus
ISIT 2005
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Igor Devetak, Andreas Winter
ISIT 2003