Preparation of (Pb,La)TiO₃ films by metal organic chemical vapor deposition with new lanthanum precursors

Abstract

Thin films of (Pb, La)TiO3 were grown with three new trialkylphosphine oxide adducts of lanthanum tris-tetramethylheptanedione with the general formula La(thd)3(RR′R″3PO)n where thd = tetramethylheptanedione, (CH3)3CCOCHCOC(CH3)3; R = R′ =R″ = CH3; R = R″ = CH3, R″ = C4H9; R = R′ = R″ = C4H9. The new precursors were compared with La(thd)3 and were evaluated for volatility, thermal stability, ease of transport and La incorporation into a (Pb, La)TiO3 film.