Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Thin films of (Pb, La)TiO3 were grown with three new trialkylphosphine oxide adducts of lanthanum tris-tetramethylheptanedione with the general formula La(thd)3(RR′R″3PO)n where thd = tetramethylheptanedione, (CH3)3CCOCHCOC(CH3)3; R = R′ =R″ = CH3; R = R″ = CH3, R″ = C4H9; R = R′ = R″ = C4H9. The new precursors were compared with La(thd)3 and were evaluated for volatility, thermal stability, ease of transport and La incorporation into a (Pb, La)TiO3 film.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT
T.N. Morgan
Semiconductor Science and Technology