Conference paper
Polysilanes. Radiation sensitive materials for microlithography
R.D. Miller
ACS Division of Polymer Chemistry Washington DC Meeting 1990
R.D. Miller
ACS Division of Polymer Chemistry Washington DC Meeting 1990
J.L. Hedrick, H.J. Cha, et al.
Macromolecules
J.L. Hedrick, M. Trollsas, et al.
American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
M. Stähelin, Cecilia A. Walsh, et al.
Journal of Applied Physics