K.N. Tu
Materials Science and Engineering: A
The limits of accuracy in an automatic wavelength-scanning ellipsometer are defined on the basis of measured mechanical properties of the instrument and the geometrical and optical defects of the optical components. A computational procedure is described for obtaining accurate Δ and ψ values by using a matrix model of the instrument, and the areás in which the greatest improvements in accuracy can be achieved are identified. © 1976.
K.N. Tu
Materials Science and Engineering: A
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
Michiel Sprik
Journal of Physics Condensed Matter