Porosity effect on the dielectric constant and thermomechanical properties of organosilicate films

Abstract

The porosity effect on the dielectric constant and thermomechanical properties of organosilicate films was analyzed. The porous organosilicate films were formed by templated vitrification of copolymers consisting of a low-k polymeric matrix and the pore generators. The stress-temperature slope decreased with porosity, but as the porosity approached the percolation point, the slope showed a large drop of 40%, indicating a significant degradation of the thermomechanical properties when pores became interconnected.