Applied Physics Letters

Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering

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Small angle x-ray scattering (SAXS) measurements were performed on nanoporous methyl silsesquioxane films that were generated by the incorporation of a sacrificial polymeric component into the matrix and subsequently removed by thermolysis. The average pore radii ranged from 1 to 5 nm over a porosity range of ∼5-50%. The distribution in pore size was relatively broad and increases in breadth with porosity. The values and observations obtained by SAXS are in good agreement with field emission scanning electron microscopy. © 2002 American Institute of Physics. © 2002 American Institute of Physics.