Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials