Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A number of Al binary alloy thin films were studied over a range of composition up to 40% solute using a co-sputtering technique with the substrates at room temperature. These Al alloy films were tested in 0.1 M NaCl and found to have extraordinary pitting resistance. © 1989, The Electrochemical Society, Inc. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
R. Ghez, M.B. Small
JES