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Microelectronic Engineering
Photothermal and photoacoustic spectroscopy rely on the detection of thermal or acoustic waves generated by the absorption of optical radiation and subsequent radiationless deexcitation. The principles of these spectroscopic techniques as well as most recent experimental developments are discussed. The potential and the limitations of these techniques are highlighted with typical applications. © 1988.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Zeitschrift fur Kristallographie - New Crystal Structures