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Publication
ESREF 2005
Conference paper
Photon emission microscopy of inter/intra chip device performance variations
Abstract
We propose a simple, noninvasive, optical technique to measure intra-wafer and intra-chip MOSFET performance variations. Technique utilizes correlation between device performance and weak near-infrared emission from its off-state current. It maps performance variations, producing quantitative data. We experimentally demonstrate our technique on 130 nm SOI microprocessor. © 2005 Elsevier Ltd. All rights reserved.