E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
E. Burstein
Ferroelectrics