Conference paper
Copper interconnect: Fabrication and reliability
C.-K. Hu, J.M.E. Harper
VLSI-TSA 1997
Lanthanum hexaboride (LaB6) is investigated for its potential as a low work-function photocathode for high brightness e-beam applications. Thin films of LaB6 at room temperature are shown to have quantum efficiencies of 0.2×10-3 at 442 nm excitation but readily form an inhibiting oxide. This oxide is easily removed by in situ 500 eV Ar + ion sputtering, which restores photoemission for over 30 min at an oxygen partial pressure of 10-9 Torr.
C.-K. Hu, J.M.E. Harper
VLSI-TSA 1997
Q.Z. Hong, F.M. D'Heurle, et al.
Applied Physics Letters
P.G. May, J.-M. Halbout, et al.
Advances in Semiconductors and Semiconductor Structures 1987
K. Barmak, G.A. Lucadamo, et al.
MRS Spring Meeting 1999