Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Robert E. Donovan
INTERSPEECH - Eurospeech 2001
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Computing
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ACM Transactions on Information Systems (TOIS)