T. Thomson, S.L. Lee, et al.
INTERMAG 2003
We have used a focused ion beam to directly pattern thin- film granular perpendicular Co70Cr18Pt12 media. By cutting trenches ∼6 nm deep in the ∼20 nm media, we have produced square arrays of magnetically isolated islands with periods in the range 65-500 nm. At periods below ∼130 nm we observe only single magnetic domains, which exhibit a rough "checker-board" pattern of upon ac demagnetization. We have patterned at densities of over 140 Gbit/in2.
T. Thomson, S.L. Lee, et al.
INTERMAG 2003
G.J. Kusinski, G. Thomas, et al.
Journal of Applied Physics
B.D. Terris, J.E. Stern, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
B.D. Terris, S. Rishton, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures