Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We consider colored partitions of a positive integer n, where the number of times a particular colored part m may appear in a partition of n is equal to the sum of the powers of the divisors of m. An asymptotic formula is derived for the number of such partitions. We also derive an asymptotic formula for the number of partitions of n into c colors. In order to achieve the desired bounds on the minor arcs arising from the Hardy-Littlewood circle method, we generalize a bound on an exponential sum twisted by a generalized divisor function due to Motohashi.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002