John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Andrew Skumanich
SPIE Optics Quebec 1993