Conference paper
Photothermal spectroscopy as a sensitive spectroscopic tool
A.C. Tam
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
We demonstrate a new optical and noncontact method for direct and fast detection of photoacoustic pulse propagation in thin silicon wafers. A probe beam deflection technique is used to monitor both longitudinal and Lamb wave propagations from which information on the elastic constants and the sample orientation can be obtained. Results obtained for wafers of different orientations and doping levels are compared with previous contact measurements.
A.C. Tam
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
J.C. Loulergue, A.C. Tam
Applied Physics Letters
H. Sontag, A.C. Tam
Canadian journal of physics
W. Zapka, A.C. Tam, et al.
Microelectronic Engineering