Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
No abstract available.
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
B. Wagle
EJOR
Maurice Hanan, Peter K. Wolff, et al.
DAC 1976