Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996
Kaoutar El Maghraoui, Gokul Kandiraju, et al.
WOSP/SIPEW 2010
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990