Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
An orientation of an undirected graph is a choice of direction for each of its edges. An orientation is called ideal with respect to a given set of pairs of vertices if it does not increase the shortest-path distances between the members of any of the pairs. A polynomial-time algorithm is given for constructing an ideal orientation with respect to two given pairs and any positive edge-lengths, or else recognizing that no such orientation exists. Moreover, we show that this problem is in the class NC. For a general number of pairs the problem is proven NP-complete even with unit edge-lengths. © 1989.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Minghong Fang, Zifan Zhang, et al.
CCS 2024
A. Skumanich
SPIE OE/LASE 1992
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998