Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994