M.Ya. Azbel, A. Hartstein, et al.
Physica B+C
Paper
Novel mechanism for tunneling and breakdown of thin SiO2 films
Abstract
It is suggested that resonant tunneling via defect-related states is an important mechanism for high-field carrier injection into thin SiO2 films of metal-oxide-semiconductor structures. A model is also proposed for high-field insulator breakdown which cannot be explained by available theories. © 1983 The American Physical Society.
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