Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
The intramolecular self-crosslinking of functionalized macromolecules under ultradilute conditions was analyzed. The size and the chemical nature of the nanoparticles was easily controlled by this technique. The utility of such nanoparticles in the generation of nanoporous thin films, using the particles as sacrificial porogens was also demonstrated.
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021