E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
The intramolecular self-crosslinking of functionalized macromolecules under ultradilute conditions was analyzed. The size and the chemical nature of the nanoparticles was easily controlled by this technique. The utility of such nanoparticles in the generation of nanoporous thin films, using the particles as sacrificial porogens was also demonstrated.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008