Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Paper
Nonnegative interpolation formulas for uniformly elliptic equations
Abstract
In this paper, we show the existence of nonnegative interpolation formulas for functions which are solutions of second-order uniformly elliptic equations over bounded domains. © 1968.
Related
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Sankar Basu
Journal of the Franklin Institute