Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A way of formulating nonlinear Steklov problems on nonsymmetric domains as an operator equation u = μPu, where P is completely continuous, is given. Local and global existence theorems then follow from standard techniques; these results extend earlier results for symmetric domains and equations with symmetric coefficients. Some miscellaneous results are given concerning the nature of the solution branches. © 1973.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Kenneth L. Clarkson, K. Georg Hampel, et al.
VTC Spring 2007
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992