J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
Picosecond ultrasonic techniques were used to generate and detect acoustic pulses in bonded silicon-on-insulator structures. By simulating the shapes and amplitudes of the acoustic echoes reflected from the Si-SiO2 interfaces, we can characterize the physical properties of the interfaces. We have observed that via a further thermal annealing process one can change the interface quality of a poorly bonded structure. © 1998 The Electrochemical Society, Inc.
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Peter J. Price
Surface Science