Publication
Applied Physics Letters
Paper

Noncontact thermal-wave imaging of subsurface structure with infrared detection

View publication

Abstract

A noncontact thermal imaging system using infrared detection is described. The system uses a chopped and scanned electron beam as a heat source to produce a temperature pattern on the surface of the sample. The resulting thermal radiation is detected and used for numerical image reconstruction of the sample's subsurface structure.

Date

01 Dec 1984

Publication

Applied Physics Letters

Authors

Share