Publication
Applied Physics Letters
Paper

Noncontact thermal-wave imaging of subsurface structure with infrared detection

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Abstract

A noncontact thermal imaging system using infrared detection is described. The system uses a chopped and scanned electron beam as a heat source to produce a temperature pattern on the surface of the sample. The resulting thermal radiation is detected and used for numerical image reconstruction of the sample's subsurface structure.

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Publication

Applied Physics Letters

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