Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
The sputter gun system has a unique feature which is that the substrate holder is electrically isolated from and physically outside the cathode and anode gun assembly. As a result the substrate surface temperature can be maintained at a lower level than that for the conventional diode sputtering system. This feature is particularly useful for metallization by the lift-off process. NiFe films with excellent physical and magnetic properties have been obtained. The application to overlay patterns for single-level masking bubble devices is presented. © 1976.
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
Mark W. Dowley
Solid State Communications
A. Gangulee, F.M. D'Heurle
Thin Solid Films
K.A. Chao
Physical Review B