Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have studied the "freezing" of the proton degrees of freedom in the structural glass Rb1-x(NH4)xH2PO4 (RADP) by means of incoherent neutron scattering. The elastic incoherent structure factor (EISF) for the NH4-reorientations has been determined. Three regimes are observed for the temperature dependence of the fixed window intensity. Their connection with NMR-measurements, X-ray- and Raman scattering, is discussed. © 1989.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
T. Schneider, E. Stoll
Physical Review B
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B