William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The behavior of random copolymers of polystyrene (PS) and polymethylmethacrylate (PMMA), denoted P(Sf-r-MMA1 - f), at the polymer/air, polymer/polymer and polymer/solid interfaces was investigated by neutron reflectivity. Interfacial broadening shows significant penetration of the copolymer into the adjacent homopolymer.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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SPIE Advances in Semiconductors and Superconductors 1990
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JES
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