Publication
Applied Physics Letters
Paper

Negative ion extraction from the plasma during anodization in the dc oxygen discharge

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Abstract

This letter describes an experiment which demonstrates that negative ions in the oxygen discharge are the source of the oxygen incorporated in the anodic oxide. By use of time-varying electric fields, negative oxygen ions are eliminated from the anodizing current. Under this condition, film growth is not observed. © 1971 The American Institute of Physics.

Date

22 Oct 2003

Publication

Applied Physics Letters

Authors

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