Nanoscale PtSi tips for conducting probe technologies

Abstract

A method to improve the conduction and wear properties of nanometric conducting tips by forming silicides of Pt at the tip apex is presented. Tips with PtSi apexes are fabricated in conjunction with standard Si tips. Wear measurements are carried out on both tip types of similar geometries, and a one-on-one comparison between Si and PtSi at the nanoscale is shown for the first time. Both the wear properties on tetrahedral amorphous carbon and the conduction on Au of the PtSi tip apexes are shown to be superior to the Si tips. © 2006 IEEE.