Conference paperX-ray lithography induced radiation effects in deep submicron CMOS devicesL.K. Wang, A. Acovic, et al.MRS Spring Meeting 1993
Conference paperSelf-assembling materials for lithographic patterning: Overview, status and moving forwardWilliam Hinsberg, Joy Cheng, et al.SPIE Advanced Lithography 2010
PaperSmall Signal Capacitance in Ferroelectric HZO: Mechanisms and Physical InsightsRevanth Kodoru, Atanu Saha, et al.arXiv
