About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Paper
Monitoring Contaminant Particles In Gases: A Review
Abstract
Especially in the microelectronics and pharmaceutica1 industries, particles that are microns in size and even smaller lessen the quality and quantity of the products produced. Reducing losses due to contamination requires detecting particles in air, in other gases, and in liquids, as well as on surfaces. This review covers the monitoring of particles in gases, from the perspective of contamination control primarily in the microelectronics industry. © 1988 by Hemisphere Publishing Corporation.