Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shannon's determination of the capacity of the linear Gaussian channel has posed a magnificent challenge to succeeding generations of researchers. This paper surveys how this challenge has been met during the past half century. Orthogonal minimumbandwidth modulation techniques and channel capacity are discussed. Binary coding techniques for low-signal-to-noise ratio (SNR) channels and nonbinary coding techniques for high-SNR channels are reviewed. Recent developments, which now allow capacity to be approached on any linear Gaussian channel, are surveyed. These new capacity-approaching techniques include turbo coding and decoding, multilevel coding, and combined coding/preceding for intersymbol-interference channels. © 1998 IEEE.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
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Operations Research
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ICAC 2006