K.K. Shih, D.B. Dove
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
An ion gun has been modified to operate in a continuously pumped mode, in which gas is leaked directly into the ionization region, and the vacuum system is pumped to ∼10-7 Torr Ar by a helium cryopump. A milling rate of 3.8 Å/sec was obtained for SiO2 using 2 keV Ar ions. Sample to gun distance was 5 cm. This may be compared with the rate 0.8 Å/sec, obtained when operating in a static vacuum of 5×10-5 Torr Ar.
K.K. Shih, D.B. Dove
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
D.B. Dove, R. Ludeke, et al.
Journal of Applied Physics
H.Y. Ng, D.P. Klaus, et al.
MRS Fall Meeting 1986
D.B. Dove, S. Schwarzl
Journal of Applied Physics