Michiel Sprik
Journal of Physics Condensed Matter
The effect of N content on the structure and properties of rf relatively sputtered α-SiNx was investigated. The N content in the α-SiNx film increases with the N2 flow rate until the stoichiometric composition (Si3N4) is reached. The refractive index asymptotically reaches 1.99 as the N/Si ratio approaches 1.33. The maximum density of 3.2 g/cm3 and hardness of 25 GPa are attained at the stoichiometric composition.
Michiel Sprik
Journal of Physics Condensed Matter
Ellen J. Yoffa, David Adler
Physical Review B
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures